Tungsten oxide (W2O3) is a compound of tungsten and oxygen. It has been reported (2006) as being grown as a thin film by atomic layer deposition at temperatures between 140-240 °C using W2(N(CH3)2)6 as a precursor.[1] It is not referred to in major text books e.g. Some older literature refers to the compound W2O3 but as the atomic weight of tungsten was believed at the time to be 92, i.e approximately half the modern accepted value of 183.84 the compound actually being referred to was WO3.